Film-forming DC power supply DPG-10/DPG-20
It is a DC power supply for sputtering with outputs of 10kW and 20kW. [ULVAC]
The DPG-10 and DPG-20 are DC power supplies for sputtering with outputs of 10kW and 20kW, respectively. They are composed of reliable components and circuits. This power supply is highly reliable and optimized for plasma loads, reflecting the know-how gained from years of experience in power supply applications. 【Specifications】 ○ Input Voltage: AC208V ○ Variation Range: AC187 – 229V ○ Phases, Frequency: 3-phase, 50/60Hz ○ Input Connection: Connector connection ○ Input Capacity: 13.5kVA or less For more details, please contact us or download the catalog.
- Company：アルバック／ULVAC, Inc.
- Price：Other
